Cryogenic Gas Valves in Semiconductor Manufacturing
Key Applications
| Application | Gas Type | Temperature | Valve Requirements |
| Etching | Fluorine, Chlorine | -150°C | Corrosion-resistant |
| Deposition | Silane, WF6 | -180°C | High-cycle life |
| Cleaning | Nitrogen, Argon | -196°C | Extreme cold resilience |
| Cooling | Helium, Hydrogen | -253°C | Superconducting compatibility |